Mark your selections and choose between table on screen and file format. Marking tips
For variables marked 
you need to select at least one value
Place of residence
Type and tenure status of dwelling
Area of dwelling
Age group
Person's household and family status
Number of selected data cells are:(maximum number allowed is 1,000,000)
Presentation on screen is limited to 1,000 rows and 100 columns
Number of selected cells exceeds the maximum allowed 1,000,000